Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices
- J. Brugger
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
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104 results for Peter Vettiger
Parallel nanodevice fabrication using a combination of shadow mask and scanning probe methods
- Roli Lüthi
- Reto R. Schlittler
- et al.
- 1999
- Applied Physics Letters
Ion-beam patterning of magnetic films using stencil masks
- B.D. Terris
- L. Folks
- et al.
- 1999
- Applied Physics Letters
Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry
- J. Brugger
- M. Despont
- et al.
- 1999
- Sensors and Actuators, A: Physical
5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
Ultrahigh-density atomic force microscopy data storage with erase capability
- G. Binnig
- M. Despont
- et al.
- 1999
- Applied Physics Letters
Ultrahigh density, high-data-rate NEMS-based AFM data storage system
- P. Vettiger
- J. Brugger
- et al.
- 1999
- Microelectronic Engineering
Soft, entirely photoplastic probes for scanning force microscopy
- G. Genolet
- J. Brugger
- et al.
- 1999
- Review of Scientific Instruments
SU-8: A low-cost negative resist for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1999
- JMM
Low-cost PDMS seal ring for single-side wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1998
- Sensors and Actuators, A: Physical