A conic primitive-based pattern generator for electron-beam lithography of diffractive optical elements
- H. Rothuizen
- D. Prongué
- et al.
- 1997
- Microelectronic Engineering
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104 results for Peter Vettiger
Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- Microelectronic Engineering
Fabrication of an integrated silicon-based lens for low-energy miniaturized electron columns
- Michel Despont
- Gilles Beljakovic
- et al.
- 1996
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering
Microfabrication of lenses of a miniaturized electron column
- M. Despont
- U. Staufer
- et al.
- 1995
- Microelectronic Engineering
Enhanced e-beam system for the fabrication of optical elements
- D. Prongue ́
- H. Rothuizen
- et al.
- 1995
- Microelectronic Engineering
Passive Self-Aligned Low-Cost Packaging of Semiconductor Laser Arrays on Si Motherboard
- W. Hunziker
- W. Vogt
- et al.
- 1995
- IEEE Photonics Technology Letters
A High-Density, Four-Channel, OEIC Transceiver Module Utilizing Planar-Processed Optical Waveguides and Flip-Chip, Solder-Bump Technology
- K. Jackson
- E.B. Flint
- et al.
- 1994
- Journal of Lightwave Technology
Lifetime extension of uncoated AIGaAs single quantum well lasers by high power burn-in in inert atmospheres
- W.C. Tang
- E.H. Altendorf
- et al.
- 1994
- Electronics Letters
Comparison of the facet heating behavior between AlGaAs single quantum-well lasers and double-heterojunction lasers
- W.C. Tang
- H. Rosen
- et al.
- 1992
- Applied Physics Letters