Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
- Laurent Dellmann
- Sylvian Roth
- et al.
- 1998
- Sensors and Actuators, A: Physical
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104 results for Peter Vettiger
Piezoresistive cantilever designed for torque magnetometry
- M. Willemin
- C. Rossel
- et al.
- 1998
- Journal of Applied Physics
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1998
- Sensors and Actuators, A: Physical
Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy
- Terunobu Akiyama
- Andreas Tonin
- et al.
- 1998
- Sensors and Actuators, A: Physical
A conic primitive-based pattern generator for electron-beam lithography of diffractive optical elements
- H. Rothuizen
- D. Prongué
- et al.
- 1997
- Microelectronic Engineering
Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- Microelectronic Engineering
Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering
Fabrication of an integrated silicon-based lens for low-energy miniaturized electron columns
- Michel Despont
- Gilles Beljakovic
- et al.
- 1996
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Passive Self-Aligned Low-Cost Packaging of Semiconductor Laser Arrays on Si Motherboard
- W. Hunziker
- W. Vogt
- et al.
- 1995
- IEEE Photonics Technology Letters
Microfabrication of lenses of a miniaturized electron column
- M. Despont
- U. Staufer
- et al.
- 1995
- Microelectronic Engineering