Featured collections
Popular topics
- A.P. Ghosh
- D.B. Dove
- et al.
- 1992
- Microlithography 1992
- 1992
- Microlithography 1992
- 1991
- Journal of Applied Physics
- T. Takamori
- K.K. Shih
- et al.
- 1990
- Journal of Applied Physics
- Takeshi Takamori
- John J. Boland
- et al.
- 1990
- Review of Scientific Instruments
- 1990
- Applied Physics Letters
- Juan Agui
- P.N. Sanda
- et al.
- 1990
- Electronic Imaging: Advanced Devices and Systems 1990
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
- Takeshi Takamori
- John J. Boland
- et al.
- 1989
- Applied Physics Letters
- 1989
- Proceedings of SPIE 1989