Phase formation and microstructure changes in tantalum thin films induced by bias sputtering
- Philippe Catania
- Ronnen A. Roy
- et al.
- 1993
- Journal of Applied Physics
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108 results for J.J. Cuomo
Raman scattering of laser-deposited amorphous carbon
- W.S. Bacsa
- J.S. Lannin
- et al.
- 1993
- Physical Review B
The growth of crystalline vapor deposited carbon-60 thin films
- W. Krakow
- N.M. Rivera
- et al.
- 1993
- Applied Physics A Solids and Surfaces
Electromagnetic fields in a radio-frequency induction plasma
- J. Hopwood
- C.R. Guarnieri
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Directionality of Sputtered Cu Atoms in A Hollow Cathode Enhanced Planar Magnetron
- S.M. Rossnagel
- J.J. Cuomo
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Langmuir probe measurements of a radio frequency induction plasma
- J. Hopwood
- C.R. Guarnieri
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Enhanced nucleation and growth of diamond on SiC by plasma enhanced chemical vapor deposition using thin metal films
- J.E. Yehoda
- R.I. Fuentes
- et al.
- 1992
- Applied Physics Letters
Characterization of laser vaporization plasmas generated for the deposition of diamond-like carbon
- David L. Pappas
- Katherine L. Saenger
- et al.
- 1992
- Journal of Applied Physics
Deposition of amorphous silicon using a tubular reactor with concentric-electrode confinement
- J.P. Conde
- K.K. Chan
- et al.
- 1992
- Journal of Applied Physics
Pulsed laser deposition of diamond-like carbon films
- David L. Pappas
- Katherine L. Saenger
- et al.
- 1992
- Journal of Applied Physics