Technique for determining concentration profiles of boron impurities in substratesJ.F. ZieglerG.W. Coleet al.2003Journal of Applied Physics
Discovery of anomalous base regions in transistorsJ.F. ZieglerG.W. Coleet al.2003Applied Physics Letters
Boron atom distributions in ion-implanted silicon by the (n,4He) nuclear reactionJ.F. ZieglerB.L. Crowderet al.2003Applied Physics Letters