Copper interconnect: Fabrication and reliability
- C.-K. Hu
- J.M.E. Harper
- 1997
- VLSI-TSA 1997
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
122 results for J.M.E. Harper
Silicide formation in Ti-Si and Co-Si reactions
- L. Clevenger
- Q.Z. Hong
- et al.
- 1993
- MRS Proceedings 1993
Preparation of low resistivity Cu-1 at. %Cr thin films by magnetron sputtering
- C. Cabral
- J.M.E. Harper
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Enhanced sputtering of one species in the processing of multielement thin films
- S. Berg
- C. Nender
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
MICROSTRUCTURE OF NIOBIUM FILMS ORIENTED BY NON-NORMAL INCIDENCE ION BOMBARDMENT DURING GROWTH.
- J.M.E. Harper
- D.A. Smith
- et al.
- 1985
- MRS Symposium 1985
ION BEAM TECHNIQUES FOR THE DEPOSITION OF CERAMIC THIN FILMS.
- J.M.E. Harper
- 1983
- Emergent Process Methods for High-Technology Ceramics 1983
Crystallographic texture of C54 titanium disilicide as a function of deep submicron structure geometry
- V. Svilan
- K.P. Rodbell
- et al.
- 1997
- Journal of Electronic Materials
Low Energy Ion Beam Etching
- J.M.E. Harper
- J.J. Cuomo
- et al.
- 2019
- JES
Higher nitrides of hafnium, zirconium, and titanium synthesized by dual ion beam deposition
- B.O. Johansson
- H.T.G. Hentzell
- et al.
- 2011
- Journal of Materials Research
250-Å linewidths with PMMA electron resist
- A.N. Broers
- J.M.E. Harper
- et al.
- 2008
- Applied Physics Letters