Low temperature formation of C54-TiSi2 using titanium alloys
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1997
- Applied Physics Letters
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122 results for J.M.E. Harper
Surface roughening during titanium silicide formation: A comparison between Si(100) and poly-Si substrates
- C. Lavoie
- R. Martel
- et al.
- 1996
- MRS Fall Meeting 1996
Control of in-plane texture of body centered cubic metal thin films
- J.M.E. Harper
- K.P. Rodbell
- et al.
- 1997
- Journal of Applied Physics
Copper interconnect: Fabrication and reliability
- C.-K. Hu
- J.M.E. Harper
- 1997
- VLSI-TSA 1997
In-plane crystallographic texture of bcc metal thin films on amorphous substrates
- J.M.E. Harper
- K.P. Rodbell
- et al.
- 1997
- MRS Spring Meeting 1997
Crystallographic texture of C54 titanium disilicide as a function of deep submicron structure geometry
- V. Svilan
- K.P. Rodbell
- et al.
- 1997
- Journal of Electronic Materials
Lowering the formation temperature of the C54-TiSi2 phase using a metallic interfacial layer
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1997
- Journal of Materials Research
Microstructure control in semiconductor metallization
- J.M.E. Harper
- K.P. Rodbell
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
In-situ X-ray diffraction analysis of TiSi2 phase formation from a titanium-molybdenum bilayer
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1996
- MRS Fall Meeting 1996
Phase formation in Cu(Sn) alloy thin films
- L. Clevenger
- B. Arcot
- et al.
- 1996
- MRS Spring Meeting 1996