DUV stability of carbon films for attenuated phase shift mask applications
- Alessandro Callegari
- Katherina Babich
- et al.
- 1998
- SPIE Advanced Lithography 1998
Publications
Date
Featured collections
Popular topics
58 results for F. Cardone
Process damage and contamination effects for shallow Si implanted GaAs
- H. Barratte
- G. Scilla
- et al.
- 1989
- ECS Meeting 1989
Passivation of dopants in ion implanted and rapid thermally annealed GaAs in H+ plasma environment
- J.P. de Souza
- D.K. Sadana
- et al.
- 1990
- Symposium on Process Physics and Modeling in Semiconductor Technology 1990
Epitaxial Growth of GaAs with (C2H5)2GaCl and AsH3 in a Hotwall Reactor
- T.F. Kuech
- M.A. Tischler
- et al.
- 2019
- JES
Process Damage and Contamination Effects for Shallow Si Implanted GaAs
- H. Baratte
- A.J. Fleischman
- et al.
- 2019
- JES
Quantitative analysis of complex targets by proton-induced x rays
- W. Reuter
- A. Lurio
- et al.
- 2008
- Journal of Applied Physics
Epitaxial small magnetic bubble La-Sm-Lu iron garnet films grown on NdGaG substrates oriented (100) and (111)
- E.A. Giess
- R.J. Kobliska
- et al.
- 2008
- Journal of Applied Physics
LPE Growth and Composition of Magnetic EuTm‐CaGe Iron Garnet Films
- E.A. GIESS
- C.F. GUERCI
- et al.
- 2006
- JACerS
Mg in GaN: Incorporation of a volatile species at high temperatures during molecular beam epitaxy
- S. Guha
- N.A. Bojarczuk
- et al.
- 1997
- Applied Physics Letters
Defect states in strain-relaxed Si0.7Ge0.3 layers grown at low temperature
- P.M. Mooney
- L. Tilly
- et al.
- 1997
- Journal of Applied Physics