Elemental composition profiling in thin films by glow-discharge mass spectrometry: Depth resolution
- J.W. Coburn
- E.W. Eckstein
- et al.
- 2008
- Journal of Applied Physics
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Diagnostics of an r.f. sputtering glow discharge - correlation between atomic absorption and mass spectrometry
- E.W. Eckstein
- J.W. Coburn
- et al.
- 1975
- International Journal of Mass Spectrometry and Ion Physics