E.W. Eckstein, J.W. Coburn, et al.
International Journal of Mass Spectrometry and Ion Physics
The depth resolution of a nickel-copper interface has been measured as a function of the total depth of analysis using the glow-discharge mass-spectrometric depth-profiling technique. A possible interpretation of the results is that the depth resolution is determined by a 30-Å depth-independent interface broadening plus a broadening which varies between 2 and 8% of the total depth of analysis.
E.W. Eckstein, J.W. Coburn, et al.
International Journal of Mass Spectrometry and Ion Physics
J.W. Coburn, Harold F. Winters
Applications of Surface Science
William R. Creasy, Jeffrey A. Zimmerman, et al.
Journal of Applied Physics
W.D. Gill, Eric Kay
Review of Scientific Instruments