W.D. Gill, Eric Kay
Review of Scientific Instruments
The depth resolution of a nickel-copper interface has been measured as a function of the total depth of analysis using the glow-discharge mass-spectrometric depth-profiling technique. A possible interpretation of the results is that the depth resolution is determined by a 30-Å depth-independent interface broadening plus a broadening which varies between 2 and 8% of the total depth of analysis.
W.D. Gill, Eric Kay
Review of Scientific Instruments
K. Köhler, D.E. Horne, et al.
Journal of Applied Physics
E.W. Eckstein, J.W. Coburn, et al.
International Journal of Mass Spectrometry and Ion Physics
Eric Kay
JVSTA