Experimental evaluation of a 20×20 mm footprint microcolumn
- E. Kratschmer
- H.S. Kim
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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19 results for T.H.P. Chang
Electron beam microcolumn for multi-beam applications
- E. Kratschmer
- H.S. Kim
- et al.
- 1995
- IVMC 1995
Electron-beam microcolumn technology and applications
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1995
- SPIE Optical Science, Engineering, and Instrumentation 1995
Micromachining applications of a high resolution ultrathick photoresist
- K.Y. Lee
- N. LaBianca
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Miniature Electron-Optical Columns
- T.H.P. Chang
- D. Kern
- et al.
- 1991
- IEEE T-ED
Inverter Performance Of Deep-Submicrometer Mosfet'S
- George A. Sai-Halasz
- Matthew R. Wordeman
- et al.
- 1988
- IEEE Electron Device Letters
EXPERIMENTAL TECHNOLOGY AND CHARACTERIZATION OF SELF-ALIGNED 0. 1 mu M-GATE-LENGTH LOW-TEMPERATURE OPERATION NMOS DEVICES.
- G.A. Sai-Halasz
- M.R. Wordeman
- et al.
- 1986
- IEDM 1986
Fabrication and testing of single-crystal lanthanum hexaboride rod cathodes
- F.J. Hohn
- T.H.P. Chang
- et al.
- 1982
- Journal of Applied Physics
Electron-beam fabrication of high-density amorphous bubble film devices
- K.Y. Ahn
- T.H.P. Chang
- et al.
- 1975
- IEEE Transactions on Magnetics