Publications

176 results at JVSTA

Summary Abstract: Investigation of the interface chemistry of titanium-tungsten Schottky barrier contacts to silicon by Auger spectroscopy
- - J.E. Lewis
  - M.O. Aboelfotoh
  - et al.
- 1985
- JVSTA
Chemical reactions at Pt/oxide/Si and Ti/oxide/Si interfaces
- - M. Liehr
  - F.K. LeGoues
  - et al.
- 1985
- JVSTA
Stress modification of WSi_2.2 films by concurrent low energy ion bombardment during alloy evaporation
- - D.S. Yee
  - J. Floro
  - et al.
- 1985
- JVSTA
Summary Abstract: Resistivity-process relationships in TiSi₂ formed from Ti-Si reaction couples
- - H.-O. Blom
  - S. Berg
  - et al.
- 1985
- JVSTA
Secondary electron effect on power-voltage relationship in rf sputtering
- - B. Bumble
  - J.J. Cuomo
- 1985
- JVSTA
Formation of TiSi₂ and TiN during nitrogen annealing of magnetron sputtered Ti films
- - E.D. Adams
  - K.Y. Ahn
  - et al.
- 1985
- JVSTA
Characterization of electron-beam deposited tungsten films on sapphire and silicon
- - J.H. Souk
  - J.F. O'Hanlon
  - et al.
- 1985
- JVSTA
Thermal desorption spectroscopy of Xe at the Si(111) as a local probe for surface structures
- - J.W. Bartha
  - U. Barjenbruch
  - et al.
- 1985
- JVSTA
Summary Abstract: Comparison between the adsorption of PH₃ and B₂H₆ on Si surfaces as related to the CVD of Si
- - M.L. Yu
  - D.J. Vitkavage
  - et al.
- 1985
- JVSTA
The etching of W(111) with XeF₂
- - Harold F. Winters
- 1985
- JVSTA