Cu and dilute binary Cu(Ti), Cu(Sn) and Cu(Al) thin films: Texture, grain growth and resistivity
- A. Gungor
- K. Barmak
- et al.
- 2002
- MRS Proceedings 2002
Publications
3512 results for Materials Discovery
The growth of tantalum thin films by plasma-enhanced atomic layer deposition and diffusion barrier properties
- H. Kim
- C. Cabral Jr.
- et al.
- 2002
- MRS Proceedings 2002
Terabit density cobalt nanowire arrays with tunable magnetic properties
- Andrei Ursache
- Mustafa Bal
- et al.
- 2002
- MRS Proceedings 2002
Evaluation of the chemical-mechanical planarization (CMP) performance of silicon nitride and silicon carbide as hard mask materials for Cu-based interconnect technology
- Wei-Tsu Tseng
- Jia Lee
- et al.
- 2002
- MRS Spring Meeting 2002
Dynamic AFM using the FM technique with constant excitation amplitude
- B. Gotsmann
- H. Fuchs
- 2002
- Applied Surface Science
8 Gb/s CMOS compatible monolithically integrated silicon optical receiver
- Sebastian M. Csutak
- Jeremy D. Schaub
- et al.
- 2002
- OFC 2002
Kinetic effects in heteroepitaxial growth
- 2002
- Applied Surface Science
Defect-tolerant and directional wet-etch systems for using monolayers as resists
- Matthias Geissler
- Heinz Schmid
- et al.
- 2002
- Langmuir
Asymmetric block copolymers with homopolymers: Routes to multiple length scale nanostructures
- U. Jeong
- H.C. Kim
- et al.
- 2002
- Advanced Materials
Synthesis and characterization of polypyrrole-graft-poly(ε-caprolactone) copolymers: New electrically conductive nanocomposites
- D. Mecerreyes
- R. Stevens
- et al.
- 2002
- Synthetic Metals