Magnetic tunnel junctions fabricated at tenth-micron dimensions by electron beam lithography
- S. Rishton
- Y. Lu
- et al.
- 1997
- Microelectronic Engineering
Publications
221 results at Microelectronic Engineering
Micromechanics: A toolbox for femtoscale science: "Towards a laboratory on a tip"
- R. Berger
- Ch. Gerber
- et al.
- 1997
- Microelectronic Engineering
Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- Microelectronic Engineering
An MOS transistor with Schottky source/drain contacts and a self-aligned low-resistance T-gate
- S. Rishton
- K. Ismail
- et al.
- 1997
- Microelectronic Engineering
Quantitative model of the thickness dependence of breakdown in ultra-thin oxides
- 1997
- Microelectronic Engineering
On the relationship between stress induced leakage currents and catastrophic breakdown in ultra-thin SiO2 based dielectrics
- D.A. Buchanan
- J.H. Stathis
- et al.
- 1997
- Microelectronic Engineering
Gate oxide characterization with ballistic electron emission microscopy
- R. Ludeke
- H.J. Wen
- 1997
- Microelectronic Engineering
Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering
Scaling silicon MOS devices to their limits
- S.J. Wind
- D.J. Frank
- et al.
- 1996
- Microelectronic Engineering
The nanoworld: Chances and challenges
- Heinrich Rohrer
- 1996
- Microelectronic Engineering