CDSEM AFM hybrid metrology for the characterization of gate-all-around silicon nano wires
- Shimon Levi
- Ishai Schwarzband
- et al.
- 2014
- SPIE Advanced Lithography 2014
Publications
14338 results for Physical Sciences
Closed-loop high-speed 3D thermal probe nanolithography
- Armin W. Knoll
- Michal Zientek
- et al.
- 2014
- SPIE Advanced Lithography 2014
Estimating pattern sensitivity to the printing process for varying dose/focus conditions for RET development in the sub-22nm era
- Benoit Seguin
- Henri Saab
- et al.
- 2014
- SPIE Advanced Lithography 2014
ICE: Ionic contrast enhancement for organic solvent negative tone develop
- Linda K. Sundberg
- Gregory M. Wallraff
- et al.
- 2014
- SPIE Advanced Lithography 2014
Molecular glass resists for scanning probe lithography
- Christian Neuber
- Andreas Ringk
- et al.
- 2014
- SPIE Advanced Lithography 2014
Towards electrical testable soi devices using directed self-assembly for fin formation
- Chi Chun Liu
- Cristina Estrada-Raygoza
- et al.
- 2014
- SPIE Advanced Lithography 2014
Strain scaling for CMOS
- Stephen W. Bedell
- Ali Khakifirooz
- et al.
- 2014
- MRS Bulletin
Dissecting the contributions of β-hairpin tyrosine pairs to the folding and stability of long-lived human γd-crystallins
- Zaixing Yang
- Zhen Xia
- et al.
- 2014
- Nanoscale
Magnetism in single metalloorganic complexes formed by atom manipulation
- Taeyoung Choi
- M. Badal
- et al.
- 2014
- Nano Letters
Inelastic light-scattering from spin-density excitations in the regime of the persistent spin helix in a GaAs-AlGaAs quantum well
- C. Schönhuber
- M.P. Walser
- et al.
- 2014
- Physical Review B - CMMP