Publications

221 results at Microelectronic Engineering

Scaling silicon MOS devices to their limits
- - S.J. Wind
  - D.J. Frank
  - et al.
- 1996
- Microelectronic Engineering
Electron-beam microcolumn fabrication and testing
- - M. Despont
  - U. Staufer
  - et al.
- 1996
- Microelectronic Engineering
Fabrication of Aharonov-Bohm rings in Si/SiGe heterostructure
- - K.Y. Lee
  - K. Ismail
  - et al.
- 1995
- Microelectronic Engineering
Anomalous positive charge formation by atomic hydrogen exposure
- - R.E. Stahlbush
  - E. Cartier
  - et al.
- 1995
- Microelectronic Engineering
Atomic hydrogen-induced degradation of the Si SiO₂ structure
- - E. Cartier
  - J.H. Stathis
- 1995
- Microelectronic Engineering
Micromechanical structures for data storage
- - T.C. Reiley
  - L.-S. Fan
  - et al.
- 1995
- Microelectronic Engineering
Enhanced e-beam system for the fabrication of optical elements
- - D. Prongue ́
  - H. Rothuizen
  - et al.
- 1995
- Microelectronic Engineering
Kinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- - G.M. Wallraff
  - John M. Hutchinson
  - et al.
- 1995
- Microelectronic Engineering
Microfabrication of lenses of a miniaturized electron column
- - M. Despont
  - U. Staufer
  - et al.
- 1995
- Microelectronic Engineering
Stress induced leakage currents in thin oxides
- - D.J. DiMaria
- 1995
- Microelectronic Engineering