Post copper CMP hybrid clean process for advanced BEOL technology
- Wei-Tsu Tseng
- Vamsi Devarapalli
- et al.
- 2013
- IEEE Trans Semicond Manuf
Publications
14339 results for Physical Sciences
Impact of sub-wavelength electromagnetic diffraction in optical lithography for semiconductor chip manufacturing
- Jaione Tirapu Azpiroz
- Alan E. Rosenbluth
- 2013
- IMOC 2013
PVD Cu reflow seed process optimization for defect reduction in nanoscale Cu/Low-k dual damascene interconnects
- K. Motoyama
- O. Van Der Straten
- et al.
- 2013
- JES
Biodegradable broad-spectrum antimicrobial polycarbonates: Investigating the role of chemical structure on activity and selectivity
- Willy Chin
- Chuan Yang
- et al.
- 2013
- Macromolecules
Tribute to Professor D. S. Lieberman: On the importance of being invariant
- G.B. Olson
- D. Gupta
- 2013
- Journal of Alloys and Compounds
Antimicrobial polycarbonates: Investigating the impact of balancing charge and hydrophobicity using a same-centered polymer approach
- Amanda C. Engler
- Jeremy P. K. Tan
- et al.
- 2013
- Biomacromolecules
Relative contributions of polarizability and free volume in reduction of refractive index and dielectric constant with fluorine substitution in polyimides by positron annihilation spectroscopy
- Gareth G. Hougham
- Y.C. Jean
- 2013
- Macromolecular Chemistry and Physics
Next-generation nanotechnology laboratories with simultaneous reduction of all relevant disturbances
- Emanuel Lörtscher
- Daniel Widmer
- et al.
- 2013
- Nanoscale
Liquid coating processes for nanoparticle films with defined microstructure
- Tobias Kraus
- 2013
- AIChE 2013
Dot-matrix marks for dynamic overlay measurements in electron beam lithography
- Ernst Kratschmer
- James J. Bucchignano
- et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures