The Polycrystalline-Si Contact to GaAs
- P.D. Kirchner
- J.M. Woodall
- et al.
- 2019
- JES
Publications
509 results at JES
A Study of Luminescent Centers in Reactive-Ion-Etched Silicon
- T.D. Bestwick
- G.S. Oehrlein
- et al.
- 2019
- JES
Laser Decomposition of Platinum Metallo-Organic Films for Electroless Copper Plating
- Rosario C. Sauso
- Arunava Gupta
- et al.
- 2019
- JES
PtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- H.-C.W. Huang
- B. Cunningham
- et al.
- 2019
- JES
Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation
- E. Tierney
- 2019
- JES
Corrosion and Passivation of Fe and FeN Films
- V. Brusic
- G.S. Frankel
- et al.
- 2019
- JES
Reactive ion Etching of Silicon and Silicon Dioxide in CF4 Plasmas Containing H2 or C2F4 Additives
- J.P. Simko
- 2019
- JES
low Temperature Silicon Epitaxy by Hot Wall Ultrahigh Vacuum/Low Pressure Chemical Vapor Deposition Techniques: Surface Optimization
- B.S. Meyerson
- E. Ganin
- et al.
- 2019
- JES
Measurement of Thin-Film Dissolution Kinetics using a Quartz Crystal Microbalance
- W.D. Hinsberg
- C.G. Willson
- et al.
- 2019
- JES
A Two-Dimensional Process Model for Chemimechanical Polish Planarization
- J. Warnock
- 2019
- JES