Current status of reduced temperature silicon epitaxy by chemical vapor deposition
- B.S. Meyerson
- 2019
- JES
Publications
509 results at JES
MS Studies of Anodic Surface Films on Copper Electrodes
- Joseph G. Gordon IIW
- 2019
- JES
A Study of the Copper/Cyanide Solution Interphase by Polarization Modulated FT-IR Spectroscopy
- J.G. Gordon
- W.G. Golden
- et al.
- 2019
- JES
A new process using two photo-masks to prepare trilayer thin film transistors
- Yue Kuo
- 2019
- JES
Energy Considerations in the Deposition of High-Quality Plasma-Enhanced CVD Silicon Dioxide
- E. Tierney
- J. Batey
- et al.
- 2019
- JES
Laser Decomposition of Platinum Metallo-Organic Films for Electroless Copper Plating
- Rosario C. Sauso
- Arunava Gupta
- et al.
- 2019
- JES
Comparison of Thermoluminescence and Phosphorescence between Electron-Excited and U.V.-Excited Zinc Silicate Phosphors
- Takeshi Takamori
- Derek B. Dove
- 2019
- JES
Inhibition of Silicon Oxidation During Low Temperature Epitaxial Growth
- P.D. Agnelle
- T.O. Sedgwick
- 2019
- JES
Acceleration Factors for the Decomposition of Thermally Grown SiO2 Films
- S.I. Raider
- 2019
- JES
Analysis of Coincidence Losses for a Monitor of Particle Contamination on Surfaces
- Douglas W. Cooper
- Robert J. Miller
- 2019
- JES