Atomic hydrogen-induced degradation of the Si SiO2 structure
- E. Cartier
- J.H. Stathis
- 1995
- Microelectronic Engineering
Publications
Date
Featured collections
Popular topics
221 results at Microelectronic Engineering
Anomalous positive charge formation by atomic hydrogen exposure
- R.E. Stahlbush
- E. Cartier
- et al.
- 1995
- Microelectronic Engineering
The nanometer age: Challenge and chance
- H. Rohrer
- 1995
- Microelectronic Engineering
Dissociation kinetics of hydrogen-passivated (100) Si SiO2 interface defects
- 1995
- Microelectronic Engineering
Doping profiling with scanning surface harmonic microscopy
- M. Johnson
- J.P. Bourgoin
- et al.
- 1995
- Microelectronic Engineering
Stress induced leakage currents in thin oxides
- D.J. DiMaria
- 1995
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- T. Leslie
- W. Arden
- et al.
- 1994
- Microelectronic Engineering
High-resolution electron-beam lithography for fabricating visible semiconductor lasers with curved mirrors and integrated holograms
- P. Unger
- V. Boegli
- et al.
- 1994
- Microelectronic Engineering
Fabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- R. Viswanathan
- David Seeger
- et al.
- 1994
- Microelectronic Engineering
Laser stimulated photocathode electron beam prober for 15ps resolution waveform measurements
- Albert J. Fixl
- Keith A. Jenkins
- 1994
- Microelectronic Engineering