Publications

221 results at Microelectronic Engineering

Kinetics of thermal and acid-catalyzed deprotection in deep-UV resist materials
- - G.M. Wallraff
  - John M. Hutchinson
  - et al.
- 1995
- Microelectronic Engineering
Stress induced leakage currents in thin oxides
- - D.J. DiMaria
- 1995
- Microelectronic Engineering
Enhanced e-beam system for the fabrication of optical elements
- - D. Prongue ́
  - H. Rothuizen
  - et al.
- 1995
- Microelectronic Engineering
Micromechanical structures for data storage
- - T.C. Reiley
  - L.-S. Fan
  - et al.
- 1995
- Microelectronic Engineering
Determination of Helium presence in the mask/wafer gap of X-ray lithography steppers
- - Juan R. Maldonado
  - Ron DellaGuardia
  - et al.
- 1995
- Microelectronic Engineering
Microfabrication of lenses of a miniaturized electron column
- - M. Despont
  - U. Staufer
  - et al.
- 1995
- Microelectronic Engineering
Photolithography overview for 64 megabit production
- - T. Leslie
  - W. Arden
  - et al.
- 1994
- Microelectronic Engineering
SEM/EBIC characterization of degradation at mirrors of GaAs/AlGaAs laser diodes
- - Abram Jakubowicz
  - Albert Oosenbrug
- 1994
- Microelectronic Engineering
Laser stimulated photocathode electron beam prober for 15ps resolution waveform measurements
- - Albert J. Fixl
  - Keith A. Jenkins
- 1994
- Microelectronic Engineering
Improved underlayers for acid amplified resists
- - H.S. Sachdev
  - R.W. Kwong
  - et al.
- 1994
- Microelectronic Engineering