Birefringence control and manipulation in SiliconOxyNitride
- Folkert Horst
- Bert Offrein
- et al.
- 2004
- SPIE IOPTO 2004
Publications
3561 results for Mathematical Sciences
Broad bandwidth double-trench waveguides in silicon-on-insulator photonic crystal slabs
- N. Moll
- Y. Vlasov
- et al.
- 2004
- SPIE IOPTO 2004
Pipage rounding: A new method of constructing algorithms with proven performance guarantee
- A.A. Ageev
- M. Sviridenko
- 2004
- J Combin Optim
Classification of the Spatial Equilibria of the Clamped Elastica: Numerica Continuation of the Solution Set
- Michael E. Henderson
- Sebastien Neukirch
- 2004
- IJBC
Fault diagnosis for a turbine engine
- Yixin Diao
- Kevin M. Passino
- 2004
- Control Engineering Practice
Rinse additives for line edge roughness control in 193 nm lithography
- Dario L. Goldfarb
- Sean D. Burns
- et al.
- 2004
- Microlithography 2004
Fast calculation of images for high numerical aperture lithography
- Alan E. Rosenbluth
- Gregg Gallatin
- et al.
- 2004
- SPIE Advanced Lithography 2004
Measurements of water distribution in thin lithographic films
- Bryan D. Vogt
- Christopher L. Soles
- et al.
- 2004
- Microlithography 2004
Fundamentals of developer-resist interactions for line-edge roughness and critical dimension control in model 248 nm and 157 nm photoresists
- Vivek M. Prabhu
- Michael X. Wang
- et al.
- 2004
- Microlithography 2004
Surface and bulk chemistry of chemically amplified photoresists: Segregation in thin films and environmental stability issues
- Erin L. Jablonski
- Vivek M. Prabhu
- et al.
- 2004
- Microlithography 2004