Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Temperature distribution in an ideal azimuthally symmetric chemicalvapor-deposition reactor
- - David E. Kotecki
  - Richard A. Conti
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Etching of silicon in low-pressure plasmas containing fluorine and oxygen: A comparison of real-time and postplasma surface studies
- - Gottlieb S. Oehrlein
  - Gerrit M.W. Kroesen
  - et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Differential method for measuring coverage-dependent adsorption probabilities
- - John G. Wilman
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The use of secondary ion mass spectrometry to investigate copolymer enhanced adhesion between immiscible polymers
- - V.R. Deline
  - H.R. Brown
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Helium plasma enhanced chemical vapor deposited oxides and nitrides: Process mechanisms and applications in advanced device structures
- - A.A. Bright
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Collimated magnetron sputter deposition
- - S.M. Rossnagel
  - D.J. Mikalsen
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface etching and roughening in integrated processing of thermal oxides
- - M. Offenberg
  - M. liehr
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Relation of thickness and some physical properties of NiFe thin films
- - R.M. Valletta
  - G. Guthmiller
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Characterization of epitaxial thin films by x-ray diffraction
- - Armin Segmuller
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ion-beam sputtered diamond-like carbon with densities of 2.9 g/cc
- - Jerome J. Cuomo
  - John Bruley
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films