Factors Affecting the Molybdenum Line Slope by Reactive Ion Etching
- Yue Kuo
- 2019
- JES
Publications
509 results at JES
Kinetics of Oxygen Gas Evolution on Hydrous Rhodium Oxide Films
- Eugene J.M. O'Sullivan
- Laurence D. Burke
- 2019
- JES
Various Properties of Sputter-Deposited HfB2 Films
- J.M. Eldridge
- A.R. Forouhi
- et al.
- 2019
- JES
Reactive Ion Etching of PECVD Amorphous Silicon and Silicon Nitride Thin Films with Fluorocarbon Gases
- Yue Kuo
- 2019
- JES
Reactive Ion Etching of GaAs in Chlorine and Resulting Surface Damage
- B.S. Lee
- H. Baratte
- 2019
- JES
XPS Studies on Emersed Silver Electrodes: Coverage and Bonding State of Specifically Adsorbed Chloride
- Wolfgang Kautek
- Joseph G. Gordon
- 2019
- JES
Oxidation of Plasma-Deposited α-SixC1-x:H Films
- J.M. Eldridge
- J.O. Moore
- et al.
- 2019
- JES
Electrochemical Properties of Polyimides and Related Imide Compounds
- A. Viehbeck
- M.J. Goldberg
- et al.
- 2019
- JES
Redeposition during Deep Trench Etching
- Jacob Jorne
- 2019
- JES
Novel Polymeric Dissolution Inhibitor for the Design of Sensitive, Dry Etch Resistant, Base-Developable Resist
- Hiroshi Ito
- Elizabeth Flores
- et al.
- 2019
- JES