Diamondlike carbon materials as low-k dielectrics for multilevel interconnects in ULSI
- A. Grill
- V.V. Patel
- et al.
- 1996
- MRS Fall Meeting 1996
Publications
3512 results for Materials Discovery
Three-dimensional finite element analysis of subsurface stresses and shakedown due to repeated sliding on a layered medium
- E.R. Kral
- K. Komvopoulos
- 1996
- Journal of Applied Mechanics, Transactions ASME
Templating a face-centered cubic (110) termination of C60
- P.W. Murray
- J.K. Gimzewski
- et al.
- 1996
- Surface Science
Epitaxial growth of thin films of SrTi1-xRuxO3-δ by pulsed laser deposition
- A. Gupta
- B.W. Hussey
- et al.
- 1996
- Materials Research Bulletin
Wear resistant fluorinated diamondlike carbon films
- Alfred Grill
- Vishnubhai V. Patel
- 1996
- New Diamond and Frontier Carbon Technology
Film crystallographic texture and substrate surface roughness in layered aluminum metallization
- K.P. Rodbell
- V. Svilan
- et al.
- 1996
- MRS Spring Meeting 1996
Parallel simulations of rapid fracture
- F.F. Abraham
- 1996
- MRS Fall Meeting 1996
Blanket and local crystallographic texture determination in layered Al metallization
- K.P. Rodbell
- J.L. Hurd
- et al.
- 1995
- MRS Fall Meeting 1995
Formation of a crystalline metal-rich suicide in thin film titanium/silicon reactions
- L. Clevenger
- C. Cabral Jr.
- et al.
- 1996
- Thin Solid Films
Epitaxial growth of metals by sputter deposition
- G.R. Harp
- S.S.P. Parkin
- 1996
- Thin Solid Films