Localized charge force microscopy
- B.D. Terris
- J.E. Stern
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adhesion studies of metals on fluorocarbon polymer films
- Chin-An Chang
- Yong-Kil Kim
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dry etching of TiN/Al(Cu)/Si for very large scale integrated local interconnections
- K.W. Choi
- N.J. Mazzeo
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Initial stage deposition of Ag on the Si (100)2x1 surface studied by scanning tunneling microscopy
- T. Hashizume
- R.J. Hamers
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Scanning probe microscopy: Current status and future trends
- H. Kumar Wickramasinghe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nucleation controlled phase selection in vanadium/amorphous silicon multilayer thin films
- R.R. de Avillez
- E. Ma
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The importance of free radical recombination reactions in CF4 /02 plasma etching of silicon
- K.F. Jensen
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Scanning tunneling microscopy and spectroscopy of thin metal films on the GaAs(110) surface
- P. Martensson
- R.M. Feenstra
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
(100) and (111) Ni films epitaxially grown on Cu by the metal-metal epitaxy on silicon technique near room temperatures
- Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adsorption of boron on Si(111): Physics, chemistry, and atomic-scale electronic devices
- Ph. Avouris
- In-Whan Lyo
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films