Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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310 results at Thin Solid Films

Formation of thin films of CoSi₂: Nucleation and diffusion mechanisms
- - F.M. d'Heurle
  - C.S. Petersson
- 1985
- Thin Solid Films
Reaction of silicon with films of CoNi alloys: Phase separation of the monosilicides and nucleation of the disilicides
- - F.M. D'Heurle
  - D.D. Anfiteatro
  - et al.
- 1985
- Thin Solid Films
Structures of co-evaporated copper alloys
- - J. Kim
  - D.S. Yee
- 1985
- Thin Solid Films
Structural characterization of a polymer monolayer on a solid surface
- - Stephen J. Mumby
  - J.F. Rabolt
  - et al.
- 1985
- Thin Solid Films
Polymerization of two unsaturated fatty acid esters in Langmuir-Blodgett films as studied by IR spectroscopy
- - J. Rabe
  - J.F. Rabolt
  - et al.
- 1985
- Thin Solid Films
Coverage of Si substrates by self-assembling monolayers and multilayers as measured by IR, wettability and X-ray diffraction
- - M. Pomerantz
  - A. Segmüller
  - et al.
- 1985
- Thin Solid Films
Electron spectroscopy study of hydrogenated amorphous carbon films formed by methane ion beam deposition
- - P. Oelhafen
  - J. Freeouf
  - et al.
- 1984
- Thin Solid Films
TiN as a high temperature diffusion barrier for arsenic and boron
- - C.-Y. Ting
- 1984
- Thin Solid Films
A critical comparison of silicide film deposition techniques
- - K.Y. Ahn
  - S. Basavaiah
- 1984
- Thin Solid Films
Reactive etching mechanism of tungsten silicide in CF₄-O₂ plasma
- - Young H. Lee
  - Mao-Min Chen
  - et al.
- 1984
- Thin Solid Films