Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Slope control of molybdenum lines etched with reactive ion etching
- - Yue Kuo
  - J.R. Crowe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Properties of W-N and Mo-N films prepared by reactive sputtering
- - K.K. Shih
  - D.B. Dove
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine
- - J. Kouvetakis
  - V.V. Patel
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
In situ plasma contamination measurements by HeNe laser light scattering: A case study
- - J.S. Mckillop
  - Kurt L. Haller
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface diffractometry and lattice imaging of scanning tunneling microscopy images
- - J.E. Demuth
  - R.J. Hamers
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dynamics of the interaction of ethane with lr(110)-(1 x2)
- - W.H. Weinberg
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X-ray reflectivity study of Si0₂on Si
- - A.A. Bright
  - G.W. Rubioff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Si₂Cl₆and Si₂H₆adsorption on CaF₂/Si(111)
- - L.J. Terminello
  - F.J. Himpsel
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The effect of solvent absorption on the electrical and dielectric properties of polyimide films
- - D.Y. Shih
  - J. Cataldo
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface photovoltage on Si(111)-(7x7) probed by optically pumped scanning tunneling microscopy
- - R.J. Hamers
  - K. Markert
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films