Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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2353 results at Journal of Applied Physics

Examination of uncoated photoresist by the low-loss electron method in the scanning electron microscope
- - Oliver C. Wells
  - Ping-Chin Cheng
- 1987
- Journal of Applied Physics
Enhanced grain growth of polycrystalline silicon at low temperature by dopant redistribution
- - T.C. Chou
  - C.Y. Wong
  - et al.
- 1987
- Journal of Applied Physics
Atomic force microscope-force mapping and profiling on a sub 100-Å scale
- - Y. Martin
  - C.C. Williams
  - et al.
- 1987
- Journal of Applied Physics
Dopant redistribution at Si surfaces during vacuum anneal
- - M. Liehr
  - M. Renier
  - et al.
- 1987
- Journal of Applied Physics
Scanning tunneling microscopy
- - Paul K. Hansma
  - Jerry Tersoff
- 1987
- Journal of Applied Physics
Tb_xNd_y(FeCo)_1-x-y: Promising materials for magneto-optical storage?
- - W. Reim
  - R.J. Gambino
  - et al.
- 1987
- Journal of Applied Physics
Properties of high-purity Al_xGa_1-xAs grown by the metalorganic vapor-phase-epitaxy technique using methyl precursors
- - T.F. Kuech
  - D.J. Wolford
  - et al.
- 1987
- Journal of Applied Physics
Inhomogeneous carbon bonding in hydrogenated amorphous carbon films
- - A. Grill
  - B.S. Meyerson
  - et al.
- 1987
- Journal of Applied Physics
Silicon etching mechanisms in a CF₄/H₂ glow discharge
- - Gottlieb S. Oehrlein
  - Holly L. Williams
- 1987
- Journal of Applied Physics
Plasma chemical aspects of magnetron ion etching with CF₄/O ₂
- - A.A. Bright
  - S. Kaushik
  - et al.
- 1987
- Journal of Applied Physics