Impact of pattern collapse on future micro/nano fabrication
- Xiao Hu Liu
- 2017
- IITC 2017
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13 results at IITC 2017
Layout based Monte-Carlo simulation (LBMCS) for complex back end of line (BEOL) design rule study
- Dongbing Shao
- Lawrence Clevenger
- et al.
- 2017
- IITC 2017
Resistivity of copper interconnects at 28 nm pitch and copper cross-sectional area below 100 nm2
- Adam Pyzyna
- Hsinyu Tsai
- et al.
- 2017
- IITC 2017