Sputtering behavior and evolution of depth resolution upon low energy ion irradiation of GaAs
- Marinus Hopstaken
- Michael Gordon
- et al.
- 2010
- Journal of Vacuum Science and Technology B
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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17 results at Journal of Vacuum Science and Technology B
Wafer-scale epitaxial graphene growth on the Si-face of hexagonal SiC (0001) for high frequency transistors
- Christos Dimitrakopoulos
- Yu-Ming Lin
- et al.
- 2010
- Journal of Vacuum Science and Technology B
Formation of epitaxial graphene on SiC(0001) using vacuum or argon environments
- Luxmi
- N. Srivastava
- et al.
- 2010
- Journal of Vacuum Science and Technology B
Contacting self-ordered molecular wires by nanostencil lithography
- L. Gross
- R.R. Schlittler
- et al.
- 2010
- Journal of Vacuum Science and Technology B
Interaction of NiSi with dopants for metallic source/drain applications
- Jun Luo
- Zhi-Jun Qiu
- et al.
- 2010
- Journal of Vacuum Science and Technology B
Dopant measurements in semiconductors with atom probe tomography
- P.A. Ronsheim
- M. Hatzistergos
- et al.
- 2010
- Journal of Vacuum Science and Technology B
Phase change memory technology
- Geoffrey W. Burr
- Matthew J. Breitwisch
- et al.
- 2010
- Journal of Vacuum Science and Technology B