Publications

33 results at ECS Transactions

Optimization of Cu damascene electrodeposition process in ULSI for yield and reliability improvement
- - Ingrid Shao
  - T. Cheng
  - et al.
- 2013
- ECS Transactions
Stress characterization of tungsten-filled through silicon via arrays using very high resolution multi-wavelength raman spectroscopy
- - Jeff Gambino
  - Daniel Vanslette
  - et al.
- 2011
- ECS Transactions
Strain engineering for fully-depleted SOI devices
- - Ali Khakifirooz
  - Pranita Kulkarni
  - et al.
- 2010
- ECS Transactions
Oxygen transport in high-κ/ metal gate stacks and physical characterization by SIMS using isotope labeled oxygen
- - Marinus Hopstaken
  - John Bruley
  - et al.
- 2010
- ECS Transactions
Low-temperature epitaxial growth of Si, SiGe, Ge, and SiC in a 300mm UHV/CVD reactor
- - Thomas N. Adam
  - Stephen W. Bedell
  - et al.
- 2010
- ECS Transactions
The role of oxygen in the development of Hf-base high-k/metal gate stacks for CMOS technologies
- - E. Cartier
- 2010
- ECS Transactions
III-V photovoltaics - Recent developments and prospects
- - N. Sosa
  - Theodore G. Van Kessel
  - et al.
- 2010
- ECS Transactions
High-κ gate dielectrics for nanoscale CMOS devices: Status, challenges, and future
- - Dae-Gyu Park
  - Xinlin Wang
- 2010
- ECS Transactions
Investigation of band gap, band alignment and bonding states of the (Tb_xSc_1-x)₂O₃/ Si system
- - I. Geppert
  - M. Eizenberg
  - et al.
- 2010
- ECS Transactions
Integration of Germanium avalanche photodetectors on silicon for on-chip optical interconnects
- - Solomon Assefa
  - Fengnian Xia
  - et al.
- 2010
- ECS Transactions