Publications

509 results at JES

Pit Growth in Nife Thin Films
- - B.M. Rush
  - J. Dukovic
  - et al.
- 2019
- JES
Investigation of Reactive-Ion-Etching-Related Fluorocarbon Film Deposition onto Silicon and a New Method for Surface Residue Removal
- - G.S. Oehrlein
  - J.G. Clabes
  - et al.
- 2019
- JES
Combined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF₄/O₂ Etching of Silicon
- - M. Dalvie
  - K.F. Jensen
- 2019
- JES
A Three-Layer Resist System for Deep U.V. and RIEMicrolithography on Nonplanar Surfaces
- - E. Bassous
  - G. Pepper
  - et al.
- 2019
- JES
The electrochemical oxidation and polymerization of polycyclic hydrocarbons
- - Joachim Bargon
  - A. Diaz
- 2019
- JES
Transpassive Dissolution of 420 Stainless Steel in Concentrated Acids under Electropolishing Conditions
- - M. Datta
  - D. Vercruysse
- 2019
- JES
Structural Effects on a Submicron Trench Process
- - Daeje Chin
  - Sang H. Dhong
  - et al.
- 2019
- JES
Submicron epitaxial films
- - B. Ginsberg
  - G.R. Srinivasan
- 2019
- JES
Approaches to the Design of Radiation-Sensitive Polymeric Imaging Systems with Improved Sensitivity and Resolution
- - Jean M.J. Fréchet
  - Theodore G. Tessier
  - et al.
- 2019
- JES
Copper Corrosion with and without Inhibitors
- - V. Brusic
  - M.A. Frisch
  - et al.
- 2019
- JES