Hexachlorodisilane as a Precursor in the LPCVD of Silicon Dioxide and Silicon Oxynitride Films
- R.C. Taylor
- B.A. Scott
- 2019
- JES
Publications
509 results at JES
Composition Determination of Electrodeposited NiSn and PbSn Alloys Using Stripping Voltammetry at a Rotating Ring-Disk Electrode
- K.H. Wong
- P.C. Andricacos
- 2019
- JES
In Situ X-Ray Absorption Study of Chromium Valency Changes in Passive Oxides on Sputtered ALCr Thin Films Under Electrochemical Control
- A.J. Davenport
- H.S. Isaacs
- et al.
- 2019
- JES
Optimization of Electrodeposit Uniformity by the Use of Auxiliary Electrodes
- S. Mehdizadeh
- J. Dukovic
- et al.
- 2019
- JES
In Situ Scanning Tunneling Microscopy of Copper Deposition with Benzotriazole
- Rolf H. Muller
- 2019
- JES
Photochemically Generated Gold Catalyst for Selective Electroless Plating of Copper
- Thomas H. Baum
- 2019
- JES
Refinement of Zinc Silicate Phosphor Synthesis
- I.F. Chong
- J.M. Brownlow
- et al.
- 2019
- JES
Reactive ion Etching of Silicon and Silicon Dioxide in CF4 Plasmas Containing H2 or C2F4 Additives
- J.P. Simko
- 2019
- JES
A Study of Luminescent Centers in Reactive-Ion-Etched Silicon
- T.D. Bestwick
- G.S. Oehrlein
- et al.
- 2019
- JES
Phosphorus-Doped Polycrystalline Silicon via LPCVD: I. Process Characterization
- B.S. Meyerson
- W.L. Olbricht
- 2019
- JES