Metallurgical reactions in Au/(InGe) ohmic contacts to GaAs
- C.R.M. Grovenor
- 1983
- Thin Solid Films
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ZrN diffusion barrier in aluminum metallization schemes
- L. Krusin-Elbaum
- M. Wittmer
- et al.
- 1983
- Thin Solid Films
Oxidation behavior of PdSi compounds
- A. Cros
- R.A. Pollak
- et al.
- 1983
- Thin Solid Films
Formation and crystallization of amorphous silicides at the interface between thin metal and amorphous silicon films
- S.R. Herd
- K.Y. Ahn
- et al.
- 1983
- Thin Solid Films
Atomic motion of dopant during interfacial silicide formation
- M. Wittmer
- C.-Y. Ting
- et al.
- 1983
- Thin Solid Films
Low temperature interdiffusion in Cu/Ni thin films
- H. Lefakis
- J.F. Cain
- et al.
- 1983
- Thin Solid Films
Ellipsometry and reflection, luminescence and Raman spectroscopies of monolayer assemblies on solid substrates
- W. Knoll
- J. Rabe
- et al.
- 1983
- Thin Solid Films
Rapid writing of fine lines in Langmuir-Blodgett films using electron beams
- A.N. Broers
- M. Pomerantz
- 1983
- Thin Solid Films
General aspects of barrier layers for very-large-scale integration applications I: Concepts
- P.S. Ho
- 1982
- Thin Solid Films
The use of titanium-based contact barrier layers in silicon technology
- C.-Y. Ting
- M. Wittmer
- 1982
- Thin Solid Films