Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Reactive ion etching of silicon using bromine containing plasmas
- - Tim D. Bestwick
  - Gottlieb S. Oehrlein
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics and mechanics of Si₂H₆ surface decomposition on Si
- - C.M. Greenlief
  - H.H. Sawin
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Spontaneous decomposition of dimethyl gold hexafluoroacetylacetonate on ion bombarded surfaces
- - A. Wagner
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Process effects on radio frequency diode reactively sputtered ZrO₂films
- - M.M. Yang
  - T.M. Reith
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ta as a barrier for the Cu/PtSi, Cu/Si, and Al/PtSi structures
- - Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nanomechanics of a Au-lr contact using a bidirectional atomic force microscope
- - Sidney R. Cohen
  - Gabi Neubauer
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Plasma induced gas heating in electron cyclotron resonance sources
- - S.M. Rossnagel
  - S.J. Whitehair
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching of plasma enhanced chemical vapor deposition amorphous silicon and silicon nitride: Feeding gas effects
- - Yue Kuo
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The determination of structure in small supported metal particles by scanning transmission electron diffraction
- - H. Poppa
  - R.D. Moorhead
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Optical emission in magnetrons: Nonlinear aspects
- - S.M. Rossnagel
  - K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films