Reactive Ion Etching of Sputter Deposited Tantalum Oxide and its Etch Selectivity to TantalumYue Kuo2019JES
Dependence of the Flatband Voltage of Si-MOS on Distribution of Cesium in SiO2 Comparison of Two Implantation MethodsL. Krusin-Elbaum2019JES
Reactive Ion Etching of PECVD n+ a-Si:H: Plasma Damage to PECVD Silicon Nitride Film and Application to Thin Film Transistor PreparationM.S. Crowder2019JES