Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

In situ laser diagnostic studies of plasma-generated particulate contamination
- - G.S. Selwyn
  - J. Singh
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A study of voids in sputtered Si02
- - Mitchell J. Hait
  - Harris C. Jones
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Molecular-beam studies of the precursor-mediated dissociative chemisorption of N2 on W(100)
- - C.T. Rettner
  - E. Schweizer
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Mixed-metal-oxide planar optical waveguides
- - G. Arjavalingam
  - Michael A. Russak
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Roughness and porosity characterization of carbon and magnetic films through adsorption isotherm measurements
- - C.L. Wang
  - M.F. Toney
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thin-film topography control with transient liquid underlayer
- - Igor Y. Khandros
  - Robert J. Baseman
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A process for improved Al (Cu) reactive ion etching
- - C.-K. Hu
  - B. Canney
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Structure of the Si(111)/CaF2 interface
- - R.M. Tromp
  - M.C. Reuter
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Radical formation and surface reaction induced by laser radiation in the C11212-Al system
- - A. Modi
  - K. Domen
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Structure of Cs on GaAs(110) as determined by scanning tunneling microscopy
- - P.N. First
  - R.A. Dragoset
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films