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Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: I. Very Low Pressure DepositionJames H. ComfortRafael Reif2019JES
Dopant Segregation in CZ and MCZ Silicon Crystal Growth: A Comparison Between Experiment and Numerical SimulationK.M. KimW.E. Langlois2019JES
Fundamental Study of Acid Copper Through-Hole Electroplating ProcessEdward K. YungLubomyr T. Romankiw2019JES