Publications

3543 results for Mathematical Sciences

Reduction of linewidth variation over reflective topography
- - Steve S. Miura
  - Christopher F. Lyons
  - et al.
- 1992
- Microlithography 1992
Fast confocal image processing for inspection
- - A.Ravishankar Rao
  - F.Y. Wu
  - et al.
- 1992
- SPIE Aerospace Sensing 1992
New techniques for patterned wafer inspection based on a model of human preattentive vision
- - Virginia H. Brecher
- 1992
- SPIE Aerospace Sensing 1992
Photoluminescence from pseudomorphically strained Si/Si1-xGex multiple quantum wells grown on silicon
- - Stefan Zollner
  - R.T. Collins
  - et al.
- 1992
- SPIE Semiconductors 1992
Alloy versus phonon contributions to intervalley scattering in Ali_1-LGa_1-LAs
- - Stefan Zollner
  - Christoph H. Greint
  - et al.
- 1992
- SPIE Semiconductors 1992
Application of atomic-force microscopy to phase-shift masks
- - A.P. Ghosh
  - D.B. Dove
  - et al.
- 1992
- Microlithography 1992
Direct phase measurements in phase-shift masks
- - A.P. Ghosh
  - D.B. Dove
- 1992
- Microlithography 1992
Critical alignments in plane mirror interferometry
- - N. Bobroff
- 1992
- Microlithography 1992
Quantitation of airborne chemical contamination of chemically amplified resists using radiochemical analysis
- - W.D. Hinsberg
  - Scott A. MacDonald
  - et al.
- 1992
- Microlithography 1992
High-speed aqueous-developing negative resist based on triflic-acid-catalyzed epoxy polymerization
- - R.D. Allen
  - Willard E. Conley
  - et al.
- 1992
- Microlithography 1992