Principal Component Analysis of Optical Emission Spectroscopy and Mass Spectrometry: Application to Reactive Ion Etch Process Parameter Estimation Using Neural Networks
- Reza Shadmehr
- David Angell
- et al.
- 2019
- JES
Publications
509 results at JES
X-Ray Absorption Study of Electrochemically Grown Oxide Films on Al-Cr Sputtered Alloys: I. Ex situ Studies
- A.J. Davenport
- H.S. Isaacs
- et al.
- 2019
- JES
Correlation of Surface Wettability and Corrosion Rate for Benzotriazole-Treated Copper
- Richard R. Thomas
- Vlasta A. Brusic
- et al.
- 2019
- JES
Surface Physics in Silicon Molecular Beam Epitaxy
- F.J. Himpsel
- J.F. Morar
- et al.
- 2019
- JES
Chemical Surface-Modification of a Polyimide: Characterization and a Kinetic Study on the Diffusion of Ions in a Modified Polymer
- Miro M. Plechaty
- Richard R. Thomas
- 2019
- JES
Paramagnetic Point Defects in Amorphous Silicon Dioxide and Amorphous Silicon Nitride Thin Films: II. a-SiNx:H
- F.C. Rong
- E.H. Poindexter
- 2019
- JES
Selective Wet and Dry Etching of Hydrogenated Amorphous Silicon and Related Materials
- I. Haller
- Y.H. Lee
- et al.
- 2019
- JES
Dopant Diffusion in Self-Aligned Silicide/Silicon Structures
- Marc Wittmer
- 2019
- JES
Effects of oxygen on the rie characteristics of aluminum films
- S.P. Holland
- Graham Olive
- et al.
- 2019
- JES
Dependence on the NiP Surface Treatment
- Doreen DiMilia
- Jean Horkans
- et al.
- 2019
- JES