Practical characterization of 0.5 μm optical lithography
- Donis G. Flagello
- Andrew T. S. Pomerene
- 1989
- Proceedings of SPIE 1989
Publications
3593 results for Mathematical Sciences
Reading and writing of photochemical holes using gaalas diode lasers
- P. Pokrowsky
- W.E. Moerner
- et al.
- 1989
- Proceedings of SPIE 1989
Soft x-ray diffraction of striated muscle
- S.F. Fan
- W.B. Yun
- et al.
- 1989
- Proceedings of SPIE 1989
Soft vacuum pulsed electron beam processing of teflon and teflon-like films
- J. Krishnaswamy
- G.J. Collins
- et al.
- 1989
- Proceedings of SPIE 1989
A double crystal multilayer x-ray monochromator
- L. Golub
- A. Quillen
- et al.
- 1989
- Proceedings of SPIE 1989
Filters for soft x-ray solar telescopes
- Eberhard Spiller
- Kurt Grebe
- et al.
- 1989
- Proceedings of SPIE 1989
Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing
- Eberhard Spiller
- 1989
- Proceedings of SPIE 1989
Modeling of optical alignment images for semiconductor structures
- Chi-Min Yuan
- Jerry Shaw
- et al.
- 1989
- Proceedings of SPIE 1989
Imaging of liquid crystals using a tunneling microscope
- J.S. Foster
- J.E. Frommer
- et al.
- 1989
- Proceedings of SPIE 1989
The P300: An approach to automated inspection of patterned wafers
- Virginia Brecher
- Raymond Bonner
- et al.
- 1989
- Proceedings of SPIE 1989