Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
- Sherif Sedky
- Paolo Fiorini
- et al.
- 1998
- JMEMS
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28 results at JMEMS
MEMS milliactuator for hard-disk-drive tracking servo
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- JMEMS
Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage
- Benjamin W. Chui
- Timothy D. Stowe
- et al.
- 1998
- JMEMS
6-MHz 2-N/m piezoresistive atomic-force-microscope cantilevers with INCISIVE tips
- Robert P. Ried
- H. Jonathon Mamin
- et al.
- 1997
- JMEMS
Performance of GaAs microbridge thermocouple infrared detectors
- Nui Chong
- Tadigadapa A. S. Srinivas
- et al.
- 1997
- JMEMS
Computation of static shapes and voltages for micromachined deformable mirrors with nonlinear electrostatic actuators
- P.K.C. Wang
- F.Y. Hadaegh
- 1996
- JMEMS
A fully integrated micromachined magnetic particle separator
- Chong H. Ahn
- Mark G. Allen
- et al.
- 1996
- JMEMS
Design, fabrication, and operation of submicron gap comb-drive microactuators
- Toshiki Hirano
- Tomotake Furuhata
- et al.
- 1992
- JMEMS