Publications

101 results at Proceedings of SPIE - The International Society for Optical Engineering

Fabrication of dual damascene BEOL structures using a Multi-Level Multiple Exposure (MLME) scheme - Part 1. Lithographic patterning
- - Dario L. Goldfarb
  - Stefan Harrer
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
High contact angle fluorosulfonamide-based materials for immersion lithography
- - Daniel P. Sanders
  - Linda K. Sundberg
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
A silicon-containing resist for immersion lithography
- - Ratnam Sooriyakumaran
  - Wu-Song Huang
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Lasing from defect states in mixed-order organic laser structures
- - K. Baumann
  - Gabriele Raino
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
The effect of photoresist/topcoat properties on defect formation in immersion lithography
- - G.M. Wallraff
  - Carl E. Larson
  - et al.
- 2007
- Proceedings of SPIE 2007
The role of copper-phthalocyanine in multilayer organic LEDs based on small molecules
- - Heike Riel
  - Tilman A. Beierlein
  - et al.
- 2002
- Proceedings of SPIE 2002
New shape representation and similarity measure for efficient shape indexing
- - Konstantin Y. Kupeev
  - Zohar Sivan
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Issues with inferring internet topological attributes
- - Lisa Amini
  - Anees Shaikh
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
IBM 9.2-Megapixel flat-panel display: Technology and infrastructure
- - Steven L. Wright
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Stochastic language model for analyzing document physical layout
- - Tapas Kanungo
  - Song Mao
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering