Low Energy Proton Beam Lithography with a Thin Oxygen-Etch Barrier Layer
- H. Hiraoka
- 2019
- JES
Publications
509 results at JES
Plasma Etching of Silicon in SF6: Experimental and Reactor Modeling Studies
- Yeong-Jyh Lii
- Jacob Jorné
- et al.
- 2019
- JES
Chemical vapor deposition of gold
- Carl E. Larson
- Thomas H. Baum
- et al.
- 2019
- JES
An XPS and TEM Study of Intrinsic Adhesion Between Polyimide and Cr Films
- N.J. Chou
- D.W. Dong
- et al.
- 2019
- JES
Interaction Between ti and SiO2
- C.-Y. Ting
- M. Wittmer
- et al.
- 2019
- JES
Plating of Copper into Through-Holes and Vias
- Richard C. Alkire
- Lubomyr T. Romankiw
- 2019
- JES
Reactive Ion Etching of Silicon Nitride Deposited by Different Methods in CF4/H2 Plasmas
- W.A. Lanford
- 2019
- JES
The electrochemical oxidation and polymerization of polycyclic hydrocarbons
- Joachim Bargon
- A. Diaz
- 2019
- JES
Design principles of bipolar electrochemical co-electrolysis cells for efficient reduction of carbon dioxide from gas phase at low temperature
- Alexandra Patru
- Tobias Binninger
- et al.
- 2019
- JES
Differential inhibition during Cu electrodeposition on Ru: Combined electrochemical and real-time TEM studies
- P. M. Vereecken
- Alex Radisic
- et al.
- 2018
- JES