Electrodeposition of Bi1-xSbx thin films
- P.M. Vereecken
- S. Ren
- et al.
- 2003
- JES
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Kinetics of particle codeposition of nanocomposites
- I. Shao
- P.M. Vereecken
- et al.
- 2002
- JES
Electromigration in on-chip single/dual damascene Cu interconnections
- C.-K. Hu
- L. Gignac
- et al.
- 2002
- JES
Submicrometer Platinum Electrodes by Through-Mask Plating
- K.L. Saenger
- G. Costrini
- et al.
- 2001
- JES
Surface Segregation of Al of the Bilayers of Pure Cu and Cu-Al Alloy Films
- Pei-I. Wang
- S.P. Murarka
- et al.
- 2001
- JES
Development of Aluminum Chemical Mechanical Planarization
- Maria Ronay
- 2001
- JES
Enhancement of Semiconductor Wafer Cleaning by Chelating Agent Addition
- Glenn W. Gale
- David L. Rath
- et al.
- 2001
- JES
Low temperature chemical vapor deposition of ZrO2 on Si(100) using anhydrous zirconium(IV) nitrate
- Ryan C. Smith
- Noel Hoilien
- et al.
- 2000
- JES
Structure of the passive film that forms on iron in aqueous environments
- Alison J. Davenport
- Lucy J. Oblonsky
- et al.
- 2000
- JES
Silicon oxynitride layers for optical waveguide applications
- R. Germann
- H. Salemink
- et al.
- 2000
- JES