Improved Dielectric Reliability of SiO2 Films with Polycrystalline Silicon Electrodes
- C.M. Osburn
- E. Bassous
- 2019
- JES
Publications
509 results at JES
Effect of V2O3 Addition on the Thermoluminescence and Phosphorescence of Tb-Activated Garnet Phosphors
- Takeshi Takamori
- Stephen Fine
- et al.
- 2019
- JES
Electron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- Hiroyuki Hiraoka
- Adolfo R. Gutierrez
- 2019
- JES
Dry Etching for VLSI—A Review
- L.M. Ephrath
- 2019
- JES
Epitaxial Relations in Films of Cr, Pt, and CrPt on Sapphire
- J.E.E. Baglin
- F.M. d'Heurle
- 2019
- JES
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- E.A. Irene
- N.J. Chou
- et al.
- 2019
- JES
Structural Composition of Polymers Relative to Their Plasma Etch Characteristics
- Lester A. Pederson
- 2019
- JES
Electrochemical Test to Evaluate Passivation Layers: Overcoats of Si in Ink
- M.H. Lee
- J.M. Eldridge
- et al.
- 2019
- JES
I. Interaction of Al Films with O2 at Low Pressures
- Jean Grimblot
- Jerome M. Eldridge
- 2019
- JES
The Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) Silicon
- E. Bassous
- E.F. Baran
- 2019
- JES