Publications

509 results at JES

Improved Dielectric Reliability of SiO₂ Films with Polycrystalline Silicon Electrodes
- - C.M. Osburn
  - E. Bassous
- 2019
- JES
Single Crystal Silicon Films on Amorphous Insulators: Growth by Lateral Nucleated Epitaxy Using Scanning Laser and Electron Beams and Evaluation by Electron Backscattering Contrast
- - T.O. Sedgwick
  - R.H. Geiss
  - et al.
- 2019
- JES
Difluorocarbene Emission Spectra from Fluorocarbon Plasmas and its Relationship to Fluorocarbon Polymer Formation
- - M.M. Millard
  - E. Kay
- 2019
- JES
Dry Etching for VLSI—A Review
- - L.M. Ephrath
- 2019
- JES
Parameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- - L.M. Ephrarh
  - D.J. Dimaria
  - et al.
- 2019
- JES
Effect of V2O3 Addition on the Thermoluminescence and Phosphorescence of Tb-Activated Garnet Phosphors
- - Takeshi Takamori
  - Stephen Fine
  - et al.
- 2019
- JES
Structural Composition of Polymers Relative to Their Plasma Etch Characteristics
- - Lester A. Pederson
- 2019
- JES
Electrochemical Test to Evaluate Passivation Layers: Overcoats of Si in Ink
- - M.H. Lee
  - J.M. Eldridge
  - et al.
- 2019
- JES
I. Interaction of Al Films with O₂ at Low Pressures
- - Jean Grimblot
  - Jerome M. Eldridge
- 2019
- JES
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- - E.A. Irene
  - N.J. Chou
  - et al.
- 2019
- JES