Publications

509 results at JES

Properties of SiO₂ Grown in the Presence of HCl or Cl₂
- - Y.J. van der Meulen
  - C.M. Osburn
  - et al.
- 2019
- JES
The Formation of SiO₂ in an RF Generated Oxygen Plasma: II. The Pressure Range Above 10 mTorr
- - A. Ray
  - A. Reisman
- 2019
- JES
On Fitting Error Functions to Data
- - R. Ghez
  - M.B. Small
- 2019
- JES
On the Removal of Insulator Process Induced Radiation Damage from Insulated Gate Field Effect Transistors at Elevated Pressure
- - A. Reisman
  - J.M. Aitken
  - et al.
- 2019
- JES
Plasma Oxide FET Devices
- - A. Ray
  - A. Reisman
- 2019
- JES
Resolution Limits Of PMMA Resist for Exposure with 50 kV Electrons
- - Alec N. Broers
- 2019
- JES
Luminescence of Silica Glasses Containing Copper
- - J.M. Brownlow
  - I.F. Chang
- 2019
- JES
TiO2 Antireflection Coatings by a Low Temperature Spray Process
- - H.J. Hovel
- 2019
- JES
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- - E.A. Irene
  - N.J. Chou
  - et al.
- 2019
- JES
Anomalous Etch Structures Using Ethylenediamine-Pyrocatechol-Water Based Etchants and Their Elimination
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES