Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Enhanced secondary electron yield from oxidized regions on amorphous carbon films studied by x-ray spectromicroscopy
- - Javier Diaz
  - Simone Anders
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Investigation of slider surfaces after wear using photoemission electron microscopy
- - Simone Anders
  - Thomas Stammler
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Interdiffusion studies of single crystal TiN/NbN superlattice thin films
- - C. Engström
  - J. Birch
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Comparison of Cl₂ and F₂ based chemistries for the inductively coupled plasma etching of NiMnSb thin films
- - J. Hong
  - J.A. Caballero
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High resolution x-ray photoelectron spectroscopy and INDO/S-CI study of the core electron shakeup states of pyromellitic dianhydride-4,4′-oxydianiline polyimide
- - Y. Nakayama
  - P. Persson
  - et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Developments in equipment support technology
- - J.J. Sullivan
  - R. Gwizdak
  - et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Localized degradation studies of ultrathin gate oxides
- - H.J. Wen
  - R. Ludeke
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of argon addition to a platinum dry etch process
- - K.R. Milkove
  - J. Coffin
  - et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Copper diffusion in amorphous germanium
- - J. Doyle
  - A.Yu. Kuznetsov
  - et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Atomic step distributions on annealed periodic Si(001) gratings
- - S. Tanaka
  - C.C. Limbach
  - et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films