Plasma induced copolymerization of hexafluoropropylene and octafluoropropane
- Pieter B. Leezenberg
- Timothy C. Reiley
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Investigation of slider surfaces after wear using photoemission electron microscopy
- Simone Anders
- Thomas Stammler
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Comparison of Cl2 and F2 based chemistries for the inductively coupled plasma etching of NiMnSb thin films
- J. Hong
- J.A. Caballero
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High resolution x-ray photoelectron spectroscopy and INDO/S-CI study of the core electron shakeup states of pyromellitic dianhydride-4,4′-oxydianiline polyimide
- Y. Nakayama
- P. Persson
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Patterning of NiFe and NiFeCo in CO/NH3 high density plasmas
- K.B. Jung
- J. Hong
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Localized degradation studies of ultrathin gate oxides
- H.J. Wen
- R. Ludeke
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Developments in equipment support technology
- J.J. Sullivan
- R. Gwizdak
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of argon addition to a platinum dry etch process
- K.R. Milkove
- J. Coffin
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Copper diffusion in amorphous germanium
- J. Doyle
- A.Yu. Kuznetsov
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Femtosecond time-resolved photoemission of electron dynamics in surface Rydberg states
- T. Hertel
- E. Knoesel
- et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films