Metal-containing fluoropolymer films produced by simultaneous plasma etching and polymerization: Effects of hydrogen or oxygen
- E. Kay
- A. Dilks
- et al.
- 2008
- Journal of Applied Physics
Publications
2360 results at Journal of Applied Physics
Grain boundary diffusion of aluminum in polycrystalline silicon films
- J.C.M. Hwang
- P.S. Ho
- et al.
- 2008
- Journal of Applied Physics
Electron trapping and detrapping characteristics of arsenic-implanted SiO2 layers
- R.F. DeKeersmaecker
- D.J. Dimaria
- 2008
- Journal of Applied Physics
A method for increasing the etch-rate ratio of oxides to nonoxides in inert-gas ion milling processes
- U. Gerlach-Meyer
- J.W. Coburn
- et al.
- 2008
- Journal of Applied Physics
Dependence of pattern dimensions on proximity functions in electron beam lithography
- Mihir Parikh
- 2008
- Journal of Applied Physics
Phase transition waves: Solitons versus shock waves
- Rolf Landauer
- 2008
- Journal of Applied Physics
Shallow silicide contact
- K.N. Tu
- W.N. Hammer
- et al.
- 2008
- Journal of Applied Physics
Comment on Correlation between process-induced in-plane distortion and wafer bowing in silicon
- Richard E. Gegenwarth
- 2008
- Journal of Applied Physics
Texture of NiSi films on Si(001), (111), and (110) substrates
- C. Detavernier
- J.L. Jordan-Sweet
- et al.
- 2008
- Journal of Applied Physics
Crystallization properties of ultrathin phase change films
- Simone Raoux
- Jean L. Jordan-Sweet
- et al.
- 2008
- Journal of Applied Physics