Aqueous developable, negative working resist made of chlorinated novolac resin
- H. Hiraoka
- A.M. Patlach
- et al.
- 1989
- Proceedings of SPIE 1989
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233 results at Proceedings of SPIE 1989
Gel resist processing for submicron CMOS and bipolar circuits
- K.E. Petrillo
- M. Smyth
- et al.
- 1989
- Proceedings of SPIE 1989
Bench evaluation of lithographic lenses from measurements of the point spread function
- Norman Bobroff
- Petra Fadi
- et al.
- 1989
- Proceedings of SPIE 1989
Soft x-ray diffraction of striated muscle
- S.F. Fan
- W.B. Yun
- et al.
- 1989
- Proceedings of SPIE 1989
Two-regime ablative hole formation process in tellurium and tellurium-alloy films
- M. Chen
- V. Marrello
- et al.
- 1989
- Proceedings of SPIE 1989
Using monolithic laser arrays for improved transmitter availability in com-puter data links
- Richard J. S. Bates
- 1989
- Proceedings of SPIE 1989
Chromium mask damage in excimer laser projection processing
- J.T.C. Yeh
- 1989
- Proceedings of SPIE 1989
Sub-picosecond raman spectroscopy of semiconductors
- J.C. Tsang
- J.A. Kash
- 1989
- Proceedings of SPIE 1989
Soft vacuum pulsed electron beam processing of teflon and teflon-like films
- J. Krishnaswamy
- G.J. Collins
- et al.
- 1989
- Proceedings of SPIE 1989
Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing
- Eberhard Spiller
- 1989
- Proceedings of SPIE 1989