Publications

509 results at JES

Residual Stress, Chemical Etch Rate, Refractive Index, and Density Measurements on SiO₂ Films Prepared Using High Pressure Oxygen
- - E.A. Irene
  - D.W. Dong
  - et al.
- 2019
- JES
Selective Etching of Silicon Dioxide Using Reactive Ion Etching with CF4-H2
- - L.M. Ephrath
- 2019
- JES
The Etching of Crystallographically Determined Orifices in Sapphire
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
The Anodic Sectioning of Beryllium
- - M.T. Shehata
  - Roger Kelly
  - et al.
- 2019
- JES
Reversal of Relative Oxidation Rates of <111> and <100> Oriented Silicon Substrates at Low Oxygen Partial Pressures
- - S.I. Raider
  - L.E. Forget
  - et al.
- 2019
- JES
Fabrication Processes for a Silicon Substrate Package for Integrated Gallium Arsenide Laser Arrays
- - Michael J. Brady
- 2019
- JES
Oxidation and Corrosion Studies of Fe1-xPdx Films
- - Wen-Yaung Lee
  - G. Scherer
  - et al.
- 2019
- JES
Control of Plasma Etch Profiles with Plasma Sheath Electric Field and RF Power Density
- - R.S. Horwath
- 2019
- JES
Electrochemical Test to Evaluate Passivation Layers: Overcoats of Si in Ink
- - M.H. Lee
  - J.M. Eldridge
  - et al.
- 2019
- JES
Etching Silicon with Fluorine Gas
- - M. Chen
  - V.J. Minkiewicz
  - et al.
- 2019
- JES