The Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
- A. Reisman
- M. Berkenblit
- et al.
- 2019
- JES
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Selective Etching of Silicon Dioxide Using Reactive Ion Etching with CF4-H2
- L.M. Ephrath
- 2019
- JES
The Etching of Crystallographically Determined Orifices in Sapphire
- A. Reisman
- M. Berkenblit
- et al.
- 2019
- JES
Electron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- Hiroyuki Hiraoka
- Adolfo R. Gutierrez
- 2019
- JES
Oxidation and Corrosion Studies of Fe1-xPdx Films
- Wen-Yaung Lee
- G. Scherer
- et al.
- 2019
- JES
Epitaxial Relations in Films of Cr, Pt, and CrPt on Sapphire
- J.E.E. Baglin
- F.M. d'Heurle
- 2019
- JES
Copolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive Resists
- Ivan Haller
- Ralph Feder
- et al.
- 2019
- JES
Anomalous Etch Structures Using Ethylenediamine-Pyrocatechol-Water Based Etchants and Their Elimination
- A. Reisman
- M. Berkenblit
- et al.
- 2019
- JES
Direct Evidence for 1 nm Pores in “Dry” Thermal SiO2 from High Resolution Transmission Electron Microscopy
- J.M. Gibson
- D.W. Dong
- 2019
- JES
Effects of Conductor Stress on Bubble Propagation in Contiguous Disk Devices
- K.Y. Ahn
- S.M. Kane
- 2019
- JES