Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A study was made of the growth and characterization of ruthenium dioxide single crystals. The optimum conditions for the growth of sound crystals by the transport and oxidation of ruthenium metal are given. The relationship of the growth conditions to crystal habit, stoichiometry, lattice constant, and resistivity is discussed. Thermal expansion data are presented. © 1979, The Electrochemical Society, Inc. All rights reserved.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
K.A. Chao
Physical Review B
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
J.C. Marinace
JES